TGXYZ02
AFM XYZ calibration grating, 100nm step height, 5µm and 10µm pitch arrays
The TGXYZ02 is an AFM calibration standard of the TGXYZ series that features:
• 500×500µm square with 5µm pitch arrays pf circular pillars and holes, as well as lines in the X and Y direction
• 1×1mm square with 10µm pitch arrays of square pillars and square holes
• step height in the range of 100nm
MikroMasch offers versions of the same calibration standard with 20nm step height (TGXYZ01) and 500nm step height (TGXYZ03).
For more detailed information on the TGXYZ series AFM calibration standards please check the TGXYZ General Description.
