HQ:XSC11/Hard/Al BS
AFM Probe with 4 Different Long Scanning, DLC Hardened Cantilevers for Various Applications
AFM probes of the HQ:XSC11 series have four different AFM cantilevers, two on each side of the holder chip. They can be used in various applications.
The HQ AFM probes offer high consistency of the AFM tip radius, the AFM cantilever reflectivity and the quality factor.
A 20 nm wear-resistant DLC coating is applied to the tip side of the AFM cantilevers. The coating is chemically inert and more hydrophobic than silicon with a natural oxide layer. The aluminum reflective coating enhances the laser reflectivity of the AFM cantilevers by approximately 2.5 times.
Hard Diamond-Like-Carbon
| Shape | Height | Full Cone Angle | Radius |
|---|---|---|---|
| Shape Rotated | Height 15 µm (12 - 18 µm)* | Full Cone Angle 40° | Radius < 20 nm |
| Cantilever | Shape | Force Const. | Res. Freq. | Length | Width | Thickness |
|---|---|---|---|---|---|---|
| Cantilever Cantilever A | Shape Beam | Force Const. 0.2 N/m(0.1 - 0.4 N/m)* | Res. Freq. 15 kHz(12 - 18 kHz)* | Length 500 µm(1 - 505µm)* | Width 30 µm(27 - 33µm)* | Thickness 2.7µm(2.2 - 3.2 µm)* |
| Cantilever Cantilever B | Shape Beam | Force Const. 2.7 N/m(1.1 - 5.6 N/m)* | Res. Freq. 80 kHz(60 - 100 kHz)* | Length 210 µm(1 - 215µm)* | Width 30 µm(27 - 33µm)* | Thickness 2.7µm(2.2 - 3.2 µm)* |
| Cantilever Cantilever C | Shape Beam | Force Const. 7 N/m(3 - 16 N/m)* | Res. Freq. 155 kHz(115 - 200 kHz)* | Length 150 µm(1 - 155µm)* | Width 30 µm(27 - 33µm)* | Thickness 2.7µm(2.2 - 3.2 µm)* |
| Cantilever Cantilever D | Shape Beam | Force Const. 42 N/m(17 - 90 N/m)* | Res. Freq. 350 kHz(250 - 465 kHz)* | Length 100 µm(1 - 105µm)* | Width 50 µm(47 - 53µm)* | Thickness 2.7µm(2.2 - 3.2 µm)* |
* typical values
